A Greedy Dynamic Priority Dispatching Policy for Intrabay in Semiconductor Wafer Fabrication System.

Lihui Wu Jie Zhang Yinbin Sun Gong Zhang

Published in: DET (2009)

Keyphrases

wafer fabrication
dispatching rule
feature selection
dynamic programming
search algorithm
greedy algorithm
decision trees
special case
scheduling problem
dynamic environments
steady state
manufacturing systems
dynamic routing