High performance source optimization using a gradient-based method in optical lithography.
Yao PengJinyu ZhangYan WangZhiping YuPublished in: ISQED (2010)
Keyphrases
- high precision
- optimization algorithm
- optimization method
- support vector machine
- optimization model
- detection method
- clustering method
- significant improvement
- experimental evaluation
- high accuracy
- classification accuracy
- segmentation method
- input data
- cost function
- preprocessing
- global optimization
- computationally efficient
- optimization process
- fully automatic
- constrained optimization
- high efficiency
- optimization procedure
- evolution strategy
- classification method
- detection algorithm
- data sets
- optimization problems
- semi supervised
- dynamic programming
- evolutionary algorithm
- objective function
- training data
- similarity measure
- genetic algorithm