In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection.

Andi Setiono Maik Bertke Wilson Ombati Nyang'au Jiushuai Xu Michael Fahrbach Ina Kirsch Erik Uhde Alexander Deutschinger Ernest J. Fantner Christian H. Schwalb Hutomo Suryo Wasisto Erwin Peiner

Published in: Sensors (2020)

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