Data mining for yield enhancement in semiconductor manufacturing and an empirical study.
Chen-Fu ChienWen-Chih WangJen-Chieh ChengPublished in: Expert Syst. Appl. (2007)
Keyphrases
- semiconductor manufacturing
- data mining
- discrete event simulation
- process control
- cluster analysis
- image enhancement
- image processing
- data mining applications
- previously unknown
- real world
- data mining techniques
- rough sets
- text mining
- data warehouse
- knowledge discovery
- machine learning
- data mining methods
- data mining tasks
- knowledge discovery in databases
- data analysis
- privacy preserving data mining
- artificial intelligence
- data mining technology
- data mining problems
- neural network
- data mining models