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Nonlinear Regression Fits for Simulated Cycle Time vs. Throughput Curves for Semicondutor Manufacturing.
Rachel T. Johnson
Feng Yang
Bruce E. Ankenman
Barry L. Nelson
Published in:
WSC (2004)
Keyphrases
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nonlinear regression
linear regression
support vector regression
regression method
support vector machine
relevance vector machine
least squares
regression problems
multi class
gaussian processes