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Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints.

Yan QiaoNaiqi WuMengChu ZhouQingyun Dai
Published in: ICNSC (2013)
Keyphrases
  • software tools
  • information retrieval
  • statistical analysis
  • resource constraints
  • data mining
  • web services
  • clustering algorithm
  • cluster analysis