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A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining.

Ziqiang QuHuafeng LiuHao OuyangChenyuan HuLiang Cheng Tu
Published in: IEEE SENSORS (2020)
Keyphrases
  • high sensitivity
  • optical fiber
  • gesture recognition
  • activity recognition
  • optical imaging
  • fiber bragg grating
  • infrared
  • image capture