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Deep reinforcement learning framework for end-to-end semiconductor process control.
Thomas Hirtz
He Tian
Shazrah Shahzad
Fan Wu
Yi Yang
Tian-Ling Ren
Published in:
Neural Comput. Appl. (2024)
Keyphrases
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end to end
process control
reinforcement learning
semiconductor manufacturing
admission control
congestion control
high bandwidth
control system
intelligent control
wireless ad hoc networks
application layer
response time
ad hoc networks
multipath
content delivery
rate allocation
real time