A Study on Yield Analysis Method Using Classifiers for Semiconductor Manufacturing.
Seima SakaguchiYasushi ArimuraTakayuki YamauchiYuichi TokuyamaTomoya KawaiHidetaka EguchiHiroyuki MorinagaHiroharu KawanakaTetsushi WakabayashiPublished in: SCIS/ISIS (2022)
Keyphrases
- classification method
- feature set
- high accuracy
- experimental study
- dynamic programming
- statistical analysis
- training samples
- support vector machine svm
- significant improvement
- detection method
- pairwise
- class labels
- cross validation
- production system
- regression analysis
- study proposes
- correlation analysis
- semiconductor manufacturing