A Hybrid Big Data Analytics Method for Yield Improvement in Semiconductor Manufacturing.
Chung-Hong LeeHsin-Chang YangShou-Chen ChengSheng-Wen TsaiPublished in: ASE BD&SI (2015)
Keyphrases
- significant improvement
- detection method
- information processing
- social networks
- image segmentation
- similarity measure
- clustering method
- database
- cost function
- big data analytics
- semiconductor manufacturing
- high accuracy
- state space
- probabilistic model
- reinforcement learning
- image sequences
- case study
- machine learning