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Low voltage electrostatic actuation and angular displacement measurement of micromirror coupled with resonant drive circuit.

Sangtak ParkManu PallapaJohn T. W. YeowEihab M. Abdel-Rahman
Published in: IECON (2012)
Keyphrases
  • low voltage
  • design considerations
  • cmos technology
  • power line
  • power management
  • hard disk drive
  • frequency band
  • mixed signal