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Lithography Simulation Basics and a Study on Impact of Lithographic Process Window on Gate and Path Delays.
Aswin Sreedhar
Sandip Kundu
Published in:
J. Low Power Electron. (2008)
Keyphrases
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neural network
development process
gender differences
real time
data sets
low cost
simulation study
factors affecting
factors influencing
simulation models
main factors
potential impact
nano scale