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A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch.

Bo LiuZhiqiu LvZhihong LiXunjun HeYilong Hao
Published in: NEMS (2010)
Keyphrases
  • high speed
  • process model
  • reconstruction process
  • neural network
  • three dimensional
  • video sequences
  • multi layer
  • radio frequency