Standards-based integration of advanced process control and optimization.
Guodong ShaoHasan LatifCarla Martin-VillalbaPeter DennoPublished in: J. Ind. Inf. Integr. (2019)
Keyphrases
- process control
- control system
- product quality
- intelligent control
- semiconductor manufacturing
- optimization problems
- optimization algorithm
- discrete optimization
- global optimization
- learning algorithm
- web services
- optimization process
- constrained optimization
- data sets
- graduate education
- seamless integration
- management tools
- widely accepted