A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products.

Xin Wang Su Wu Kaibo Wang

Published in: IEEE Trans Autom. Sci. Eng. (2015)

Keyphrases

control algorithm
control method
nano scale
control strategy
control system
control law
adaptive fuzzy
real time
neural network
reinforcement learning
fuzzy sets
monitoring system
fuzzy logic controller
pid control
single neuron