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WIP control and calibration in a wafer fab.

Zhugen ZhouOliver Rose
Published in: WSC (2012)
Keyphrases
  • camera calibration
  • control system
  • control theory
  • control method
  • adaptive control
  • process control
  • database
  • data sets
  • computer vision
  • robotic systems
  • integrated circuit
  • stereo camera
  • control strategies