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A Health Factor for Process Patterns Enhancing Semiconductor Manufacturing by Pattern Recognition in Analog Wafermaps.
Stefan Schrunner
Anna Jenul
Michael Scheiber
Anja Zernig
Andre Kästner
Roman Kern
Published in:
SMC (2019)
Keyphrases
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pattern recognition
semiconductor manufacturing
pattern analysis
process control
image processing
neural network
image analysis
signal processing
data mining
machine learning
social networks
website
pattern mining
design patterns
pattern representation