Demonstration of Integrated Micro-Electro-Mechanical Relay Circuits for VLSI Applications.
Matthew SpencerFred ChenCheng C. WangRhesa NathanaelHossein FariborziAbhinav GuptaHei KamVincent PottJaeseok JeonTsu-Jae King LiuDejan MarkovicElad AlonVladimir StojanovicPublished in: IEEE J. Solid State Circuits (2011)