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Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition.

Seunghwan LeeYonggyun ParkPengzhan LiuMuyoung KimHyeong-U. KimTaesung Kim
Published in: Sensors (2023)
Keyphrases
  • artificial neural networks
  • neural network
  • expert systems
  • knowledge base
  • case study
  • recurrent neural networks