An Integrated Gravimetric FBAR Circuit for Operation in Liquids Using a Flip-Chip Extended 0.13μm CMOS Technology.
Marcin K. AugustyniakW. WeberGottfried BeerHans MulatzL. ElbrechtH.-J. TimmeMarc TieboutWerner SimbürgerChristian PaulusBjörn EversmannDoris Schmitt-LandsiedelRoland ThewesRalf BrederlowPublished in: ISSCC (2007)