Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization.
Conrad GuhlSascha BottI. Can AlbayrakAnne WeitzmannRobert KrauseJoscha KappelBirgit ReinholdNan WuMichael ZierAndreas SchüringHongwei MaRico HüselitzBenjamin UhligMarcus WislicenusPublished in: ICICDT (2021)
Keyphrases
- design process
- conceptual design
- engineering design
- design decisions
- life cycle
- case study
- product design
- design methodology
- development process
- detailed design
- design principles
- inclusive design
- design space
- database design
- instructional design
- quality function deployment
- computer aided design
- game design
- concurrent engineering
- user centered
- design processes
- learning scenarios
- structural design
- design solutions
- acquisition process
- user interface
- collaborative design
- creative design
- object oriented
- design requirements
- artificial intelligence
- trade off
- marine power plant