Constant time interval simulation for semiconductor manufacturing.
Kazuo MiyashitaHiroyuki OzakiKazuyuki SenohHirofumi MatsuoPublished in: ETFA (1) (2003)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- process control
- simulation model
- discrete event
- information systems
- mathematical model
- data sets
- simulation environment
- production system
- database systems
- similarity measure
- multiscale
- website
- e learning
- dynamic systems
- decision making
- machine learning
- simulation models
- data mining
- neural network
- database