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A 0.084% Nonlinearity Open-Loop Capacitive Micro-Accelerometer with On-Chip Digital Nonlinearity Calibration and Embedded EEPROM.

Meng ZhaoQiancheng ZhaoZhongjian ChenWengao LuYacong ZhangGuizhen Yan
Published in: ISCAS (2021)
Keyphrases
  • open loop
  • closed loop
  • feedback control
  • control system
  • circuit design
  • camera calibration
  • real time
  • control scheme
  • stability analysis