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Analysis of the Effect of UV-LIGA Fabrication Error on the Microspring Elastic Coefficient.
Yu Qin
Liangyu Chen
Yongping Hao
Shuangjie Liu
Xianlong Hu
Published in:
IEEE Access (2019)
Keyphrases
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expert systems
statistical analysis
error bounds
database
data sets
decision making
search algorithm
data analysis
image analysis
least squares
high speed