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A 2kPa per stage and 1.3sccm flow rate modular two-stage electrostatic gas micropump with stiffened drive electrodes.
Amin Sandoughsaz
Khalil Najafi
Luis P. Bernal
Published in:
IEEE SENSORS (2016)
Keyphrases
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flow rate
input parameters
heat transfer
power plant
computational fluid dynamics
blood flow
fluid flow
fuzzy inference system
numerical simulations
hard disk drive
neural network
artificial intelligence
image processing
fuzzy logic
membership functions