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SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding.

Henrik GradinStefan BraunGöran StemmeWouter van der Wijngaart
Published in: IEEE Trans. Ind. Electron. (2012)
Keyphrases
  • flow control
  • low bandwidth
  • general purpose
  • dynamic programming
  • application specific