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Optimization of functional layers in piezoelectric thick film MEMS process.
Dong-Yeon Lee
Jaesool Shim
Tae Song Kim
Jae Hong Park
Published in:
NEMS (2011)
Keyphrases
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optimization process
data structure
optimization problems
artificial intelligence
multiscale
optimal solution
support vector
optimization algorithm
process model
optimization method
multi layer
constrained optimization