CMOS technology with copper interconnects.
Chekib AkroutJohn BialasMiles G. CanadaDuane CawthronJames CorrBijan DavariRobert FloydStephen F. GeisslerRonald GoldblattRobert HoulePaul KartschokeDiane KramerPete McCormickNorman J. RohrerGerard SalemRonald SchulzLisa SuLinda WhitneyPublished in: IEEE J. Solid State Circuits (1998)