Control ability of spin coating planarization of resist filmand optimal control of developers.
Yang-Kuao KuoChuen-Guang ChaoPublished in: Microelectron. J. (2006)
Keyphrases
- optimal control
- control problems
- control strategy
- feedback control
- dynamic programming
- reinforcement learning
- infinite horizon
- control law
- class of nonlinear systems
- brownian motion
- risk sensitive
- lyapunov function
- optimal control problems
- stochastic control
- control algorithm
- machine learning
- control method
- integer programming
- multistage
- average cost
- sufficient conditions
- neural network
- neural network controller
- linear quadratic
- real time