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Applications of control systems and optimization in the design of semiconductor capital equipment.
Upendra Ummethala
John J. Hench
Anne van Lievenoogen
Pradeep Subrahmanyan
Published in:
ACC (2013)
Keyphrases
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optimal design
control system
building blocks
engineering design
design decisions
optimum design
data sets
design process
global optimization
databases
real world
artificial intelligence
case study
optimization problems
knowledge based systems
structural design