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Process Mining Applied to the Test Process of Wafer Scanners in ASML.

Anne RozinatIvo S. M. de JongChristian W. GüntherWil M. P. van der Aalst
Published in: IEEE Trans. Syst. Man Cybern. Part C (2009)
Keyphrases
  • process mining
  • process model
  • event logs
  • business process
  • integrated circuit
  • case based reasoning
  • process control
  • clinical pathway