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Process Mining Applied to the Test Process of Wafer Scanners in ASML.
Anne Rozinat
Ivo S. M. de Jong
Christian W. Günther
Wil M. P. van der Aalst
Published in:
IEEE Trans. Syst. Man Cybern. Part C (2009)
Keyphrases
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process mining
process model
event logs
business process
integrated circuit
case based reasoning
process control
clinical pathway