Login / Signup

A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing.

M. Vimala RaniMuthu Mathirajan
Published in: Int. J. Prod. Res. (2023)
Keyphrases
  • meta analysis
  • semiconductor manufacturing
  • microarray data
  • process control
  • data sets
  • real time
  • case study
  • pattern recognition
  • scheduling problem
  • fuzzy sets
  • scheduling algorithm
  • discrete event simulation