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Patterning Nanometer Resist Features on Planar and Topography Substrates Using The 2-Step NERIME FIB Top Surface Imaging Process.
Khalil Arshak
Stephen F. Gilmartin
Damian Collins
Olga Korostynska
Arous Arshak
Published in:
ICMENS (2005)
Keyphrases
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imaging process
feature vectors
d objects
geometric features