Thermodynamics and kinetics of initial gas phase reactions in chemical vapor deposition of titanium nitride. Theoretical study of TiCl4 ammonolysis.
Stanislav Ya. UmanskiiKonstantin P. NovoselovAirat Kh. MinushevMagdalena SiodmiakGernot FrenkingAnatoli A. KorkinPublished in: J. Comput. Chem. (2001)