Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler-Bernoulli Beam Theory.
Maximilian KreyBernd HähnleinKatja TonischStefan KrischokHannes TöpferPublished in: Sensors (2020)
Keyphrases
- semi automated
- theoretical basis
- general theory
- theoretical framework
- information systems
- information retrieval
- mobile devices
- real valued
- fully automated
- automatically extracting
- automatically extracted
- automatic extraction
- knowledge extraction
- personal computer
- differential equations
- parameter values
- theoretical foundation
- computational model
- knowledge base