0.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing.
Gérard BilliotPaul MatteiBogdan VysotskyiAdrien ReynaudLouis HutinChristophe PlantierEmmanuel RollandMarc GelyGiulia UsaiClaude TaboneGaël PillonnetStéphanie RobinetSébastien HentzPublished in: ISSCC (2022)