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SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment.
Jin-Hwan Lee
Tae-Eog Lee
Published in:
IEEE Robotics Autom. Mag. (2004)
Keyphrases
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mathematical model
objective function
control system
statistical model
high level
probabilistic model
conceptual model
real time
machine learning
prior knowledge
parameter estimation
theoretical framework
process model
process control
modeling method