A novel method for fabricating MEMS three-axis accelerometers using low temperature Au-Sn eutectic bonding.
Serdar TezMustafa Mert TorunbalciTayfun AkinPublished in: IEEE SENSORS (2016)
Keyphrases
- significant improvement
- experimental evaluation
- high accuracy
- pairwise
- cost function
- dynamic programming
- detection method
- theoretical analysis
- computationally efficient
- classification accuracy
- fully automatic
- synthetic data
- human computer interaction
- similarity measure
- computational cost
- evaluation method
- input data
- cross section
- rotation angles
- high precision
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- prior knowledge
- multiscale