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First demonstration of vacuum-sealed fully integrated BEOL-compatible field emission devices for Si integrated high voltage applications.

Nishita DekaVivek Subramanian
Published in: DRC (2018)
Keyphrases
  • fully integrated
  • high voltage
  • operating conditions
  • workflow management
  • normal operation
  • case study
  • partial discharge
  • real time
  • mobile devices
  • control strategy