Wafer Map Defect Recognition and Accurate Localization Based on Defect Completion Algorithm.
Tong SangDai SunWei ZhaoRuohui ChenZeng ZengPublished in: CIS-RAM (2023)
Keyphrases
- recognition algorithm
- worst case
- experimental evaluation
- dynamic programming
- np hard
- times faster
- detection algorithm
- learning algorithm
- optimal solution
- significant improvement
- high accuracy
- recognition accuracy
- expectation maximization
- similarity measure
- cost function
- k means
- computational complexity
- pattern recognition
- optimization algorithm
- clustering method
- integrated circuit
- matching algorithm
- simulated annealing
- computational cost
- object recognition