Indirect adaptive control of reactive ion etching using neural networks.
David StokesGary S. MayPublished in: IEEE Trans. Robotics Autom. (2001)
Keyphrases
- adaptive control
- neural network
- nonlinear systems
- control method
- feedback control
- dynamic environments
- reinforcement learning
- fuzzy systems
- autonomous control
- adaptive controller
- variable structure
- control law
- neural network model
- chaotic systems
- lyapunov function
- feed forward
- integrated circuit
- thin film
- fuzzy logic
- soft computing
- neural nets
- multi layer
- real time
- computer vision
- genetic algorithm
- multi objective
- evolutionary algorithm
- search space