Integrated optimization of semiconductor manufacturing: A machine learning approach.
Nathan KuppYiorgos MakrisPublished in: ITC (2012)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- process control
- optimization algorithm
- optimization method
- global optimization
- complex engineering systems
- image segmentation
- constrained optimization
- production system
- optimization process
- simulated annealing
- supply chain
- optimization strategies
- dynamic programming
- search algorithm
- objective function