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Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges.
ChunRong Pan
MengChu Zhou
Yan Qiao
Naiqi Wu
Published in:
IEEE Trans Autom. Sci. Eng. (2018)
Keyphrases
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recent advances
semiconductor manufacturing
discrete event simulation
researchers and practitioners
lessons learned
process control
clustering algorithm
scheduling algorithm
artificial intelligence
recent developments
multimedia processing
real time
face recognition
data management
computational tools