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Scanning spreading resistance microscopy for failure analysis of nLDMOS devices with decreased breakdown voltage.

Stefan DoeringRalf RudolfMartin PinkertHagen RoetzCatejan WagnerStefan EcklMarc StrasserAndre WachowiakThomas Mikolajick
Published in: Microelectron. Reliab. (2014)
Keyphrases
  • image analysis
  • data analysis
  • computer vision
  • artificial neural networks
  • data sets
  • data mining
  • information retrieval
  • three dimensional
  • quantitative analysis