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Evaluation Method Applying Fourier Transform Analysis for Conditioned Polishing Pad Surface Topography.
Keiichi Kimura
Panart Khajornrungruang
Takahisa Okuzono
Keisuke Suzuki
Published in:
Int. J. Autom. Technol. (2011)
Keyphrases
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fourier transform
evaluation method
frequency domain
signal processing
evaluation methods
fourier analysis
evaluation model
discrete fourier transform
empirical studies
credit risk
analytic hierarchy process