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A concise subspace projection based meta-learning method for fast modeling and monitoring in multi-grade semiconductor process.
Jingxiang Liu
Weimin Zhu
Guoqing Mu
Chun-I Chen
Junghui Chen
Published in:
Comput. Ind. Eng. (2024)
Keyphrases
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meta learning
machine learning
similarity measure
pairwise
learning tasks
data sets
data mining
knowledge representation
machine learning methods