Case study: Root cause of fluorine detection during TiN ARC layer corrosion of AlSiCu metal lines.
Takuya NaoePublished in: Microelectron. Reliab. (2015)
Keyphrases
- root cause
- case study
- line detection
- object detection
- neural network
- root cause analysis
- false alarms
- detection algorithm
- stainless steel
- data sets
- automatic detection
- detection rate
- lessons learned
- false positives
- detection method
- risk management
- expert systems
- hough transform
- event detection
- anomaly detection
- artificial neural networks
- multi layer
- high level
- information systems
- data mining
- real world