Method for proposing sort screen thresholds based on modeling etest/sort-class in semiconductor manufacturing.
Wai Kuan YipLim Chun ChewWen Jau LeePublished in: CASE (2008)
Keyphrases
- dynamic programming
- high accuracy
- cost function
- preprocessing
- significant improvement
- semiconductor manufacturing
- expert systems
- high precision
- clustering method
- detection method
- error rate
- adaptive threshold
- computational complexity
- classification method
- segmentation method
- synthetic data
- optimization algorithm
- support vector machine svm
- computationally efficient
- image registration