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Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events.

M. Vimala RaniMuthu Mathirajan
Published in: IEEM (2015)
Keyphrases
  • dynamic scheduling
  • semiconductor manufacturing
  • real time
  • flexible manufacturing systems
  • discrete event simulation
  • process control
  • process planning
  • real time control
  • distributed systems
  • grid services