On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices.

Lasse Aaltonen Mikko Saukoski Kari Halonen

Published in: CICC (2006)

Keyphrases

high voltage
operating conditions
normal operation
high speed
control system
mobile devices
low cost
remote control
neural network
embedded systems
integrated circuit
partial discharge
phase locked loop